Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus that can enhance reliability.;Provided is a MEMS device (recording head 3) that includes a first substrate (pressure chamber formation substrate 29) on which a flexibly deformable thin film member (diaphragm 31) is laminated, a second substrate (sealing plate 33) disposed at an interval with respect to the first substrate (pressure chamber formation substrate 29), and an adhesion layer (43) that adheres the first substrate (pressure chamber formation substrate 29) to the second substrate (sealing plate 33), in which an end of the thin film member (diaphragm 31) extends to the outside of the end of the first substrate (pressure chamber formation substrate 29) in an in-plane direction of the first substrate (pressure chamber formation substrate 29).
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