GRATING LAYER WITH VARIABLE PITCH FORMED USING DIRECTED SELF-ASSEMBLY OF MULTIBLOCK COPOLYMERS

摘要

Disclosed herein are integrated circuits incorporating grating layers with variable pitch, and methods of producing the same. In one implementation, an integrated circuit comprises a substrate and a grating layer formed above the substrate. The grating layer comprising metal regions separated from each other by dielectric spacers, having variable metal-to-metal pitch throughout the grating layer. The integrated circuit further comprises a hard mask layer formed above the grating layer, and a via formed through the hard mask layer to electrically couple a first metal region of the grating layer to an upper interconnect structure.