VERTICAL ULTRA LOW LEAKAGE PROBE CARD FOR DC PARAMETER TEST

摘要

A probe card according to an embodiment of the present invention comprises: a plurality of probes that are in contact with a test target for transmitting an electrical signal; a probe PCB that has a signal line for distributing and transmitting an electrical signal to the plurality of probes; a first guide plate that is arranged to face the test target and that has a plurality of probe holes formed thereon into which ends of the respective plurality of probes are inserted; and a second guide plate that is arranged parallel to the first guide plate, and that has a plurality of probe holes formed thereon into which the other ends of the respective plurality of probes are inserted, wherein the signal line on the probe PCB and the other ends of the respective plurality of probes are directly electrically connected to one another via a coaxial cable.