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POSITIONAL-DEVIATION-AMOUNT ACQUISITION DEVICE, INSPECTION DEVICE, POSITIONAL-DEVIATION-AMOUNT ACQUISITION METHOD, AND INSPECTION METHOD

机译:位置形成量获取装置,检查装置,位置形成量获取方法和检查方法

摘要

An image division unit (411) of this positional-deviation-amount acquisition device (41) divides one of two images so as to acquire a group of divided areas. A suitable area specification unit (412) specifies a plurality of suitable areas from among the divided area group that are suitable for deviation amount acquisition processing for determining a positional deviation amount between the two images by determining the suitability of each divided area for the deviation amount acquisition processing. For each suitable area, a positional-deviation-amount acquisition unit (413) acquires a positional deviation amount by carrying out processing for determining the deviation amount between the two images within the suitable area. A positional-deviation-amount calculation unit (414) determines the positional deviation amount for an unsuitable area in the divided area group that is not included in the plurality of suitable areas on the basis of the positional deviation amounts of the plurality of suitable areas and the positional relationships between the plurality of suitable areas and the unsuitable area. As a result, it is possible to accurately determine the amount of positional deviation between the two images for each divided area.
机译:该位置偏差量获取装置(41)的图像划分单元(411)对两个图像之一进行划分,以获取一组划分区域。适当区域确定单元(412)从分割区域组中指定适于通过确定每个分割区域对偏差量的适合性来确定两个图像之间的位置偏差量的,适于偏差量获取处理的多个合适区域。采集处理。对于每个合适的区域,位置偏差量获取单元(413)通过执行用于确定合适的区域内的两个图像之间的偏差量的处理来获取位置偏差量。位置偏差量计算单元(414)基于多个合适区域的位置偏差量,确定多个合适区域中不包括的划分区域组中的不合适区域的位置偏差量,并且多个合适区域和不合适区域之间的位置关系。结果,可以针对每个划分区域准确地确定两个图像之间的位置偏差量。

著录项

  • 公开/公告号WO2018135112A1

    专利类型

  • 公开/公告日2018-07-26

    原文格式PDF

  • 申请/专利权人 SCREEN HOLDINGS CO. LTD.;

    申请/专利号WO2017JP40777

  • 发明设计人 SATOMI KAZUYA;AKAGI YUJI;INOUE MANABU;

    申请日2017-11-13

  • 分类号G01B11;G01N21/956;G06T7;G06T7/33;H05K3;

  • 国家 WO

  • 入库时间 2022-08-21 12:43:15

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