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Polarized image acquisition device, pattern inspection device, polarized image acquisition method, and pattern inspection method

机译:偏振图像采集装置,图案检查装置,偏振图像采集方法和图案检查方法

摘要

A polarized image acquisition apparatus includes a rotatable diaphragm to restrict a passage region of light passed through an objective lens to two regions mutually opposite across the central axis in 4n equal regions divided rotationally symmetrically in the plane orthogonal to the traveling direction of the light passed through the objective lens, and to change the angle of the passage region so that each two regions of the 4n equal regions become passage regions in order; and a rotating half-wave plate to convert, for each angle of the passage region, a P-polarized component passed through the diaphragm, in the same direction as the angle of the passage region, and an S-polarized component passed through the diaphragm, orthogonal to the angle of the passage region, into polarized waves in orthogonal first and second directions.
机译:偏振图像采集装置包括可旋转膜片,以限制通过物镜通过物镜的通道区域,以彼此相对地相对的4N等区域中的中心轴线在垂直于通过的灯的行进方向垂直地分开 物镜,并改变通道区域的角度,使得4N等区域的每个区域依次成为通道区域; 和转换的旋转半波片,用于转换通道区域的每个角度,在与通道区域的角度相同的方向上穿过隔膜的p偏振分量,以及通过膜片的S偏振分量 ,与通道区域的角度正交,进入正交第一和第二方向的偏振波。

著录项

  • 公开/公告号JP6917208B2

    专利类型

  • 公开/公告日2021-08-11

    原文格式PDF

  • 申请/专利号JP20170119850

  • 发明设计人 小川 力;

    申请日2017-06-19

  • 分类号G01N21/88;G01N21/956;G03F1/84;

  • 国家 JP

  • 入库时间 2022-08-24 20:31:30

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