INSPECTION SYSTEM AND MALFUNCTION ANALYSIS/PREDICTION METHOD FOR INSPECTION SYSTEM

摘要

An inspection device (100) having: a prober (200) that has a stage (26) holding a substrate (W) having a plurality of devices formed thereupon, a transport unit (22) that transports the substrate (W) to the stage (26), and a probe card (25) that causes a plurality of probes 25a to come in contact with electrodes in the plurality of devices upon the substrate (W); a tester (300) that applies an electric signal to the plurality of devices upon the substrate (W) via the probe card (25) and inspects the electrical characteristics of the devices; and a malfunction analysis/prediction unit (400) that, when a malfunction has occurred during inspection or a sign indicates a stage prior to a malfunction, analyzes history information for the prober (200) and tester (300) related to that malfunction and ascertains or predicts the location of the malfunction.