ROBOT SKIN APPARATUS, METHOD OF FABRICATING A ROBOT SKIN APPARATUS, AND A SYSTEM INCLUDING A ROBOT SKIN APPARATUS

摘要

A robot skin apparatus includes polymer membranes encapsulating a pressure sensor. The sensor includes piezo-sensitive material in contact with a pair of electrodes in spaced relationship to form a circuit. The apparatus may include a flexible substrate, with the electrodes thereon. The piezo-sensitive material may be piezoresistive film. The electrodes may be symmetrically patterned on the substrate to form a substantially circular peripheral boundary. The apparatus may include pressure sensors on opposite sides of a plane for temperature compensation, a plurality of pressure sensors arrayed on the substrate, and a data acquisition system. A method of fabricating the apparatus includes a wet lithography process for patterning the piezoresistive film. A system includes a pair of gripper fingers, an actuator connected to the fingers, a robot skin apparatus positioned on one of the fingers, and an electronic unit for receiving data from the robot skin and controlling the fingers.