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Plasma Reactor with Digital Control for the Rotational Frequency of a Microwave Field Using Direct Upconversion
Plasma Reactor with Digital Control for the Rotational Frequency of a Microwave Field Using Direct Upconversion
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机译:采用直接上变频的数字控制等离子体反应器,用于微波场的旋转频率
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摘要
A plasma reactor for processing workpieces has a digitally synthesized microwave source using a direct digital upconversion and a user interface for controlling the rotation frequency.
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