Semiconductor Factory Automation Solution System based on SECS Communication Protocol

摘要

The present invention relates to an automation solution system based on a semiconductor factory SEMI equipment communication standard (SECS) communication regulation. The automation solution system based on a semiconductor factory SECS communication regulation comprises a hardware (H/W) control of a semiconductor production facility of a semiconductor factory, and provides a total solution which includes a process control, a logistics control, a production management, and an interface function with a manufacturing execution system shop floor (MES). An automatic and information server (300) provides a statistical analysis and a trend view function with respect to a data comparison between the semiconductor production facilities (100), thereby judging problems and deterioration of the semiconductor production facility (100).