CT 3 A non-rotational oblique typed CT system and a reconstruction method of 3D tomographic image of the specimen thereby.

摘要

The present invention relates to a non-rotational oblique type CT device comprising: a stage; an incident radiation forming unit forming incident radiation to be irradiated onto an object to be inspected; a projected data detecting unit installed on the opposite side of an incident radiation generating unit based on the position of the object to be inspected and obtaining a projected data set generated by transmitting the incident radiation to the object to be inspected; and a three-dimensional image processing unit processing the projected data set to restore a three-dimensional internal tomographic image of an area to be inspected, wherein the incident radiation is formed as a pattern to be emitted from a radiation source which is adjacent to the object to be inspected and is located at a point separated from the central position of the area to be inspected in the outward direction, and the projected data set is obtained at one time. Both the radiation source and the object to be inspected are not rotated, and a detector obtains projected data for each angle at one time and processes the projected data in parallel, thereby reducing the overall inspection speed.