Integrated RF power delivery for continuous pulse mode operation Single input and multiple output control

摘要

The present invention relates to a radio frequency (RF) control system including an RF generator further comprising a power amplifier and a controller for outputting an RF signal. A matching network receives the RF signal and generates a plurality of RF output signals. The matching network includes a ratio tuning element that varies a power ratio between a first RF output signal of the plurality of RF output signals and a second RF output signal of the plurality of RF output signals. The first controller communicates a rate control signal to the matching network, and the matching network controls the rate tuning element in accordance with the rate control signal. The controller also controls the level or duration of the increment or decrement of the pulse edge, or the incremental change of the pulse edge.