MICRO-SUPERCAPACITOR MICRO-SUPERCAPACITOR ARRAY AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a micro-supercapacitor, a micro-supercapacitor array, and a manufacturing method thereof. According to the present invention, the micro-supercapacitor comprises: a flexible substrate (10); a metal collector (20) formed on the flexible substrate (10); a first electrode (30) formed by adsorbing first oxidized metal in a multi-wall carbon nanotube functioned with a carboxylic group on the metal collector (20); and a second electrode (40) formed by adsorbing second oxidized metal different from the first oxidized metal in the multi-wall carbon nanotube functioned with the carboxylic group on the metal collector (20).