MICRO-SUPERCAPACITOR MICRO-SUPERCAPACITOR ARRAY AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a micro supercapacitor, a micro supercapacitor array and a method of manufacturing the same. The micro supercapacitor according to the present invention includes a flexible substrate 10, a metal collector 20 formed on the flexible substrate 10, A first electrode 30 formed on the metal current collector 20 by adsorbing a first metal oxide on a multiwall carbon nanotube functionalized with a carboxyl group; And a second electrode 40 formed on the metal current collector 20 by adsorbing a first metal oxide and a second metal oxide on a multiwall carbon nanotube functionalized with a carboxyl group.