REFERENCE DEVICE MEASURING DEVICE USING SPECTROSCOPIC INTERFERENCE METHOD COATING DEVICE MEASUREMENT ACCURACY ASSURANCE METHOD OF MEASURING DEVICE USING SPECTROSCOPIC INTERFERENCE METHOD AND METHOD FOR PRODUCING COATING FILM

摘要

A reference device comprises a first non-transparent block body having a groove portion; and a second transparent block body stacked on the first block body. Moreover, light is irradiated on the groove portion of the first block body through the second block body by a measuring device using a spectroscopic interference method, and predetermined interference light corresponding to a depth of the groove portion is formed by reflection light from a surface at the first block body of the second block body and reflection light from a bottom surface of the groove portion.