A reference device, a spectral interference type measuring device, a coating apparatus, a method for guaranteeing measurement accuracy of the spectral interference type measuring device, and a method of manufacturing a coated film.

摘要

The present invention provides a standard, a measuring and coating apparatus, a measurement accuracy assurance and film manufacturing method. The standard includes a non-light-transmitting first blockhaving a groove portion, and a light-transmitting second block stacked on the first block. A spectroscopic interferometric measuring device, by using the second block, irradiates the groove portion of the first block with light, and the reflected light from the surface, close to the first block, of the second block and the reflected light from the bottom surface of the groove portion form predetermined interference light corresponding to the depth of the groove portion.