ENERGY-SENSITIVE COMPOSITION USED FOR FORMING PLANARIZATION FILM OR MICROLENS ON SUBSTRATE, METHOD OF PRODUCING CURED BODY, CURED BODY, METHOD OF PRODUCING MICROLENS, AND CMOS IMAGE SENSOR

摘要

Provided are an energy-sensitive composition which has excellent low-temperature curability and is used for forming a planarization film or a microlens on a substrate, a method of producing a cured body, the cured body, a method of producing the microlens, and a CMOS image sensor. The energy-sensitive composition of the present invention, as the energy-sensitive composition for forming the planarization film or the microlens on the substrate, comprises a resin (A) and a thermal acid generator (B). The resin (A) has a structural unit (a1) derived from hydroxyl group-containing (meth)acrylic acid derivatives and an acid generating temperature of the thermal acid generator (B) observed in differential scanning calorie measurement is 100°C to 200°C. The energy-sensitive composition further comprises an acid crosslinking structure (C), the acid crosslinking structure (C) is a partial structure of a polymer (C1) or a monomer (C2), and the polymer (C1) may be the resin (A).;COPYRIGHT KIPO 2018