Generate droplets for laser-generated plasma sources

摘要

The present disclosure relates to a nozzle for dispensing a liquid target material; Wherein each intermediate chamber is arranged to receive a target material and includes an exit aperture for outputting a target material for downstream illumination in a laser generated plasma (LPP) chamber, . In some disclosed embodiments, a control system is included for controlling at least one of gas temperature, gas pressure, and gas composition in one, some or all of the intermediate chamber (s) of the device. In one embodiment, an intermediate chamber having an adjustable length is disclosed.