Droplet generator and laser-generated plasma radiation source

摘要

A droplet generator as used in an EUV radiation source, and an associated EUV radiation source and lithographic apparatus. The droplet generator can include a nozzle assembly for discharging fuel in the form of droplets, the nozzle assembly being in a pressurized environment at approximately the same pressure as the fuel pressure in the droplet generator. The droplet generator may include an actuator that contacts the pump chamber using a biasing mechanism having an actuator support biased relative to the actuator and is biased relative to the pump chamber. The actuator acts on the fuel in the pump chamber to create droplets. The actuator support has a material with a larger coefficient of thermal expansion than its surrounding structure, so it can move within the surrounding structure at ambient temperature, but will expand with respect to the surrounding structure at the operating temperature. To clamp the actuator support against the surrounding structure. [Selection] Figure 3