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METHOD FOR MANUFACTURING SPARTING TARGET AND SPARTING TARGET
METHOD FOR MANUFACTURING SPARTING TARGET AND SPARTING TARGET
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机译:制造分割目标和分割目标的方法
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摘要
And a central portion of the upper surface of the target material is heated while being pressed from above in front of the outer peripheral portion of the upper surface by the hot plate to diffusion bond the target material to the backing plate material.
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