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METHOD FOR MANUFACTURING SPARTING TARGET AND SPARTING TARGET
METHOD FOR MANUFACTURING SPARTING TARGET AND SPARTING TARGET
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机译:制造分割目标和分割目标的方法
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摘要
[PROBLEMS] To produce a sputtering target which is unlikely to generate abnormal discharge. A method for manufacturing a sputtering target, in which a plurality of abrasives different in the number of the sputtering surfaces are sputtered on a sputter surface of a target material made of a metal having a Vickers hardness of 100 or less, .
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