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LiCoO2 LiCoO2 SPUTTERING TARGET PRODUCTION METHOD THEREFOR AND POSITIVE ELECTRODE MATERIAL THIN FILM
LiCoO2 LiCoO2 SPUTTERING TARGET PRODUCTION METHOD THEREFOR AND POSITIVE ELECTRODE MATERIAL THIN FILM
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机译:LiCoO2 LiCoO2溅射靶的制备方法及其正极和薄膜材料的制作
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摘要
A sputtering target made of a composition of LiCoO 2, and the resistivity of the target less than 100 Ω㎝, LiCoO 2 sputtering target, characterized in that the relative density is 80% or more. INDUSTRIAL APPLICABILITY The sputtering target of the present invention is useful for the formation of a positive electrode thin film in a high-tension thin-film lithium ion secondary battery for use in automobiles, information communication appliances, home appliances and the like.
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