ESD protection for MEMS RF applications

摘要

The present invention relates generally to MEMS intrinsic technology and the combination of solid state ESD protection circuits specifically designed in the latest solid state technology for RF applications. Using ESD protection in MEMS devices may be somewhat complex in integration and may be seen as a disadvantage. However, the net benefits of the overall performance level for insertion loss, isolation, and linearity are greater than such disadvantages.