A holding arrangement for holding a substrate, a carrier for holding the substrate, a vacuum processing system, a method for holding the substrate, and a method for releasing the substrate

摘要

The present disclosure provides a holding arrangement (100). A holding arrangement (100) for holding a substrate includes: a body portion (110) having a first side (112); A dry adhesive material 120 provided on the first side 112 of the body portion 110; A seal (130) configured to surround the dry adhesive material (120) and provide a vacuum region on the first side (112); a dry adhesive material (120) provided in the vacuum region; And a conduit (140) for evacuating the vacuum region.;