Generating high-resolution images from low-resolution images for semiconductor applications

摘要

Methods and systems are provided for generating a high resolution image of a sample from one or more low resolution images of the sample. One system includes one or more computer subsystems configured to obtain one or more low resolution images of a specimen. The system also includes one or more components that are executed by one or more computer subsystems. The one or more components include a model comprising one or more first layers configured to generate a representation of one or more low resolution images. The model also includes one or more second layers configured to generate a high resolution image of the sample from the representation of the one or more low resolution images.