PROCESS RECIPE EVALUATION METHOD STORAGE MEDIUM ASSISTING DEVICE FOR PROCESS RECIPE EVALUATION AND LIQUID PROCESSING APPARATUS

摘要

The present invention provides a technique capable of evaluating a risk of liquid splash of a process recipe in a liquid processing apparatus performing liquid process by supplying a process liquid to a substrate while rotating a substrate. In a developing apparatus, risk data in which the number of rotation of a wafer (W) is match with the number of times of liquid splash for each combination of supply positions of a developer at the wafer (W) is already written in a first storage unit (93). Then, when a user writes a process recipe, a change on standing of the number of times of the liquid splash assumed in the process recipe, the total number of times of the liquid splash assumed in the process recipe, and the number of times of the liquid splash assumed at each developing step are displayed from the risk data. As a result, a liquid splash risk can be identified in the process recipe newly written or changed by the user, thereby contributing to evaluation of the process recipe.