INSPECTION STAND INSPECTION SYSTEM AND INSPECTION METHOD

摘要

An inspection unit, an inspection system and an inspection method for automatically verifying whether or not an inspection unit is abnormal are disclosed. The inspection base according to the present invention includes a verification reference body for verifying whether or not an inspection unit that receives the reflected light irradiated to the inspection body is abnormal. The verification reference body includes a first verification unit for verifying the accuracy of the inspection unit movement A second verification target for verifying the accuracy with respect to the height measurement of the inspection unit, and a third verification target for verifying the reference plane for the pattern light and the height measurement irradiated by the inspection unit.