3 Substrate of Surface Enhanced Raman Scattering of three dimensions nanoporous-structure and manufacture method thereof

摘要

The present invention relates to a surface-enhanced Raman scattering substrate of a three-dimensional nano-porous structure and a manufacture method thereof which can control a deposition film deposited on a substrate to have porosity and a three-dimensional nano-porous structure of a desired size, and manufacture the substrate by a low-cost process method. The manufacture method comprises: (a) a step of performing nucleation after forming vapor of a single atom in a cluster source; (b) a step of controlling sizes of nano-cluster particles and aggregation by condensation in the cluster source; (c) a step of discharging nano-cluster particles grown in step (B) to a process chamber through an opening of a nozzle arranged on the cluster source; and (d) a step of controlling a pressure applied in the process chamber to perform coalescence of the nano-cluster particles on the substrate to form a deposition film of a three-dimensional nano-porous structure. Manufacturing costs can be reduced since a surface-enhanced Raman scattering substrate of a three-dimensional nano-porous structure can be manufactured by a simple process method.