PERHYDROPOLYSILAZANE COMPOSITION CONTAINING SAME AND METHOD FOR FORMING SILICA FILM USING SAME

摘要

[PROBLEMS] To provide a perhydro polysilazane capable of forming a siliceous film having few defects and a curing composition containing the same.[Solution] According to the present invention, there is provided a perhydropolysilazane having a weight average molecular weight of 5,000 or more and 17,000 or less, wherein the solution of the 17% by weight solution of the perhydropolysilazane in xylol^OneAs a result of 1 H-NMR measurement, SiH 4 based on the amount of aromatic ring hydrogen in xylol_{1, 2}Of 0.235 or less and the amount ratio of NH 3 is 0.055 or less, and a curing composition comprising the same. The present invention also provides a method for forming a silica-containing film by applying the composition for curing and heating the composition.