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Composite thin film of reduced graphene by self-assembly method and a vacuum sensor using the same

机译:自组装还原石墨烯复合薄膜及使用该薄膜的真空传感器

摘要

The present invention, reduction of graphene of the self-assembled composite film production method and a reduced graphene self-assembly relates to a vacuum degree measurement sensor using the composite membrane, the insert is homogeneously embedded a reduced graphene self-assembling composite membrane production process and reduction of graphene layer So reduction for sensing the vacuum level by detecting the resistance value that varies according to the degree of bend of the pin provides the degree of vacuum measured by the sensor self-assembly membrane. Reduced graphene self-assembling composite vacuum sensor and the vacuum gauge using a film of the invention has a possible advantage of a simple and small size of the change in the electrical resistance value measured by the vacuum precision cursor.;
机译:本发明涉及一种减少石墨烯的自组装复合膜的生产方法以及一种减少石墨烯的自组装,涉及一种使用该复合膜的真空度测量传感器,该嵌件被均匀地嵌入了一种减少石墨烯自组装的复合膜的生产工艺。因此,通过检测根据销的弯曲程度而变化的电阻值来检测真空度的减少提供了由传感器自组装膜测量的真空度。减少的石墨烯自组装复合真空传感器和使用本发明的膜的真空计具有可能的优点,即通过真空精度光标测量的电阻值的变化的简单和小尺寸。

著录项

  • 公开/公告号KR101827078B1

    专利类型

  • 公开/公告日2018-02-07

    原文格式PDF

  • 申请/专利权人 신라대학교 산학협력단;

    申请/专利号KR20160005464

  • 发明设计人 정주라;이유진;안성일;

    申请日2016-01-15

  • 分类号C01B31/04;G01L21/00;G01N27/04;

  • 国家 KR

  • 入库时间 2022-08-21 12:38:25

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