High-Frequency Power Supplies, and Power Supplies for Dual Cathodes

摘要

In a high-frequency power supply apparatus for outputting an AC voltage that is opposite in phase to each other, in a configuration in which the output of the high-frequency output circuit is divided into two, different voltage values of high voltage and low voltage can not be switched to correspond to necessity, Is reduced to a peak value of half of the output voltage of the circuit. In the high-frequency power supply apparatus, by switching the connection state of the voltage dividing circuit for dividing the high-frequency voltage divided by the voltage dividing circuit into the AC voltage which is opposite in phase to the ground potential, and changing the voltage ratio of the two output voltage, And outputs it. It is possible to selectively output different voltage values between the high voltage and the low voltage by changing the connection state in the voltage divider circuit and to select and output the high voltage at the output terminal of the high frequency power supply device at the time of high voltage output, Thereby suppressing the decrease from the output voltage.