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METHOD OF MEASURING IMAGE USING IMAGE MEASUREMENT APPARATUS BASED ON VIS/NIR MICROSCOPY HYPERSPECTRAL IMAGER

机译:基于VIS / NIR显微镜超光谱成像仪的图像测量装置测量图像的方法

摘要

The present invention relates to a method of measuring an image using an image measurement apparatus based on a visible/near infrared (VIS/NIR) microscopy hyperspectral imager. The method includes: a displacement stage capable of moving a measurement plate provided with a sample in X and Y axis directions; an object lens provided on the measurement plate to adjust a distance to the measurement plate, into which an image of the sample is inputted; a long pass filter provided on the object lens to transmit light of a long wavelength; an achromatic lens provided on the long pass filter to remove chromatic aberration of the light passing through the long pass filter; an entrance slit into which the light passing through the achromatic lens enters; a collimator mirror for reflecting the light passing through the entrance slit by parallel light; a diffraction plate for diffracting the light, reflected by the collimator mirror, according to a wavelength of corresponding light; a light concentration mirror for collecting and reflecting the light, diffracted by the diffraction plate; and a detector for measuring a hyperspectral spectrum reflected by the light concentration mirror. Since a method for nondestructively measuring an image based on a VIS/NIR microscopy hyperspectral imager acquires image information of a measurement target object by acquiring hyperspectral images, which can be measured in a VIS/NIR band, by a wavelength band, there is an effect of implementing and classifying a three-dimensional stack structure such as a semiconductor module or an inner structure of a sample in which heterogeneous materials are compositively configured as an image of each wavelength band.;COPYRIGHT KIPO 2018
机译:本发明涉及一种使用基于可见/近红外(VIS / NIR)显微镜高光谱成像仪的图像测量设备测量图像的方法。该方法包括:位移台,其能够在X和Y轴方向上移动装有样品的测量板。物镜设置在测量板上,以调节到测量板的距离,将样本图像输入到该物镜;在物镜上设置有长通滤光片,以透射长波长的光;在长通滤光器上设置有消色差透镜,以消除通过长通滤光器的光的色差;穿过消色差透镜的光进入的入口狭缝;准直镜,用于通过平行光反射通过入口狭缝的光;衍射板,用于根据相应的光的波长来衍射由准直镜反射的光。聚光镜,用于收集和反射由衍射板衍射的光。检测器用于测量由聚光镜反射的高光谱。由于基于VIS / NIR显微镜高光谱成像仪的无损测量图像的方法通过获取可以在VIS / NIR波段按波长带测量的高光谱图像来获取测量目标物体的图像信息,因此具有效果实现和分类三维堆叠结构(例如半导体模块或样品的内部结构),其中将异质材料组合配置为每个波段的图像。; COPYRIGHT KIPO 2018

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