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CRYSTALLINE ALIGNMENT LAYER LAMINATE STRUCTURE ELECTRONIC MEMORY AND METHOD FOR MANUFACTURING CRYSTALLINE ALIGNMENT LAYER LAMINATE STRUCTURE
CRYSTALLINE ALIGNMENT LAYER LAMINATE STRUCTURE ELECTRONIC MEMORY AND METHOD FOR MANUFACTURING CRYSTALLINE ALIGNMENT LAYER LAMINATE STRUCTURE
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机译:结晶对准层的层状结构电子存储器及制造结晶对准层的层状结构的方法
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摘要
The present invention provides a crystal orientation layer laminate structure capable of selecting a wide variety of materials for a base substrate and an electrode substrate, an electronic memory using the crystal orientation layer laminate structure, and a method for manufacturing the crystal orientation layer laminate structure. A crystal orientation layered laminate structure according to the present invention is a laminated structure of a crystal orientation layer laminated on a substrate and formed of any one of germanium, silicon, tungsten, germanium-silicon, germanium-tungsten, and silicon-tungsten, at the same time being stacked on the orientation control layer and the orientation control layer SbTe, Sb 2 Te 3, BiTe, Bi 2 Te 3, BiSe, and Bi 2 Se is formed by the three main component is any one of a first is oriented in a certain crystal orientation And a crystal orientation layer.
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机译:本发明提供了能够选择用于基础基板和电极基板的多种材料的晶体取向层层叠结构,使用该晶体取向层层叠结构的电子存储器以及制造该晶体取向层层叠结构的方法。本发明的晶体取向层叠体是层叠在基板上的由锗,硅,钨,锗硅,锗钨和硅钨中的任一种构成的晶体取向层的层叠结构。同时堆叠在方向控制层和方向控制层上SbTe,Sb 2 Sub> Te 3, Sub> BiTe,Bi 2 Sub> Te 3, Sub> BiSe和Bi 2 Sub> Se是由三个 Sub>主成分形成的,第一个成分中的任何一个都以一定的晶体取向和晶体取向方向层。
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