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Laser induced forward transfer and transfering method using the same

机译:激光诱导的正向转移和使用该方法的转移方法

摘要

The present invention relates to a learner transfer apparatus, which comprises a transfer head mounted on a main stage and capable of adjusting a position in three axial directions and having a holder for holding a transfer body formed on a bottom surface of the transfer layer, So that the transfer layer of the transfer body is transferred to the transfer object by a light irradiation path which is provided in the light irradiation unit and which is connected to the condenser lens A first laser provided to emit a first laser beam and a second laser beam emitted to emit a second laser beam so as to trim a transfer pattern transferred to a transfer object in a light irradiation path attached to the light irradiation unit to the condenser lens in a set shape A second laser, and a transfer pattern mounted on the light irradiation unit and trimming-processed by the second laser in the light irradiation path leading to the condensing lens, A third laser provided to emit a third laser beam so as to emit a third laser beam so as to emit a laser beam so as to emit the laser beam so that the laser beam is emitted from the first laser to the third laser, And a control unit for controlling the driving and controlling the driving of the drying gas injection unit. According to such a laser transfer device and transfer method, the transfer pattern transferred to the transfer object can be trimmed to a desired shape, and the electrical characteristics can be improved through sintering, and the transfer operation is performed while the transfer object is in contact with the transfer object So that the transfer operation can be easily performed.
机译:学习器传送装置技术领域本发明涉及一种学习器传送装置,其包括安装在主平台上并且能够在三个轴向方向上调节位置的传送头,并且具有用于保持传送体的保持器,该保持器形成在传送层的底表面上。通过设置在光照射单元中并连接到聚光透镜的光照射路径将转印体的转印层转印到转印对象上。第一激光被设置为发射第一激光束和第二激光束。发射以发射第二激光束,以修整在附接到光照射单元的光照射路径中转移到转印对象的转印图案,并以设定形状A将第二激光和安装在该光上的转印图案修整到聚光透镜上。照射单元,并在通向聚光透镜的光照射路径中由第二激光进行修整处理,提供第三激光,以发射第三激光束,从而发射第三激光束,从而发射激光束,从而发射激光束,从而将激光束从第一激光器发射到第三激光器,以及控制单元,用于控制驱动器和控制驱动器的驱动。干燥气体注入单元。根据这种激光转印装置和转印方法,可以将转印到转印对象的转印图案修整成期望的形状,并且可以通过烧结来改善电特性,并且在与转印对象接触的同时进行转印操作。这样,就可以容易地进行转印操作。

著录项

  • 公开/公告号KR101890933B1

    专利类型

  • 公开/公告日2018-08-22

    原文格式PDF

  • 申请/专利权人 한국광기술원;

    申请/专利号KR20160145934

  • 发明设计人 박종복;이동길;

    申请日2016-11-03

  • 分类号G03F7/20;

  • 国家 KR

  • 入库时间 2022-08-21 12:37:16

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