High-precision automatic test equipment

摘要

The present invention relates to a high-precision tester for automatically measuring the electric properties of a semiconductor device. The high-precision tester of the present invention includes: a device cabinet forming the exterior of the tester; a tray loading unit placed in the cabinet, and loading a tray to store a plurality of semiconductor devices; a work stage forming a test position for the semiconductor devices; a chip pick and place unit placed to be transferred between the tray loading unit and the work stage, and transferring the semiconductor devices in the tray, which have been loaded into the tray loading unit, to the work stage; a testing vision unit testing the exterior of the semiconductor devices on the work stage; an align vision unit aligning the semiconductor devices on the work stage; and a semiconductor device testing unit testing the semiconductor devices through a probe card coming in contact with the semiconductor devices.