UV Silazane reforming method using a UV pulse

摘要

One embodiment of the present invention relates to a method of coating a surface of a substrate coated with a polysilazane, a step of pretreating the surface of the substrate coated with the polysilazane, and a step of irradiating the surface of the pretreated substrate with a pulse UV, To a silica. The present invention also provides a method for producing a silica film.