- - METHOD FOR DETERMINING KEEP-OUT ZONE OF THROUGH SILICON VIA AND COMPUTER-READERBLE RECORDING MEDIUM STORING KEEP-OUT ZONE DETERMINIG PROGRAM

摘要

A method for determining a keep-out zone of a through silicon via according to the present invention comprises the steps of: measuring a capacitance of a through silicon via to derive a capacitance-bias voltage curve; calculating a flattening voltage capacitance of the silicon through electrode by a capacitance equivalent circuit relation to the through silicon via; calculating a flattening voltage of the through silicon via by the flattening voltage capacitance and the capacitance-bias voltage curve; calculating an interface electrical potential between a substrate unit and a dielectric unit of the through silicon via by the flattening voltage; and calculating a keep-out zone of the through silicon via by the interface electrical potential. Therefore, the keep-out zone of the through silicon via manufactured under the same process condition may be quickly and accurately determined.