公开/公告号RU2646536C1
专利类型
公开/公告日2018-03-05
原文格式PDF
申请/专利号RU20160150464
发明设计人 TIKHOMIROV VLADIMIR GENNADEVICH (RU);VYUGINOV VLADIMIR NIKOLAEVICH (RU);GUDKOV ALEKSANDR GRIGOREVICH (RU);GORODNICHEV ARTEM ARKADEVICH (RU);ZYBIN ANDREJ ARTUROVICH (RU);VIDYAKIN SVYATOSLAV IGOREVICH (RU);PARNES YAKOV MIKHAJLOVICH (RU);CHIZHIKOV SERGEJ VLADIMIROVICH (RU);
申请日2016-12-21
分类号H01L29/772;
国家 RU
入库时间 2022-08-21 12:35:45