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Concept for compensating the influence of external disturbances on physical function parameters of integrated circuits

机译:补偿外部干扰对集成电路物理功能参数影响的概念

摘要

A circuit (150; 200) for generating an output signal (116) which depends on a physical useful variable (108), comprising: - means (106) for detecting the physical useful variable (108), wherein the means (106) for Detection is arranged to produce an output signal (116) of the physical effective size (108), a control signal (112) for the means (106) for detecting, and at an unchanged control signal (112) from an external disturbance ( 118, 118, 119); - sensor means (120) for detecting the external disturbance (118 ', 118, 119) and for providing a sensor signal (122) dependent on the external disturbance (118', 118, 119); and - means (124) for processing the sensor signal (122) to influence the control signal (112) in response to the sensor signal (122) so as to reduce the influence of the external disturbance (118 ', 118, 119) on the output signal is; - wherein the circuit further comprises a memory (152) which is adapted to store information which the influence of the external disturbance (118 ', 118, 119) on the sensor signal (122), the control signal (112) and / or reproduce the output signal (116); - wherein the circuit (150; 200) is an integrated circuit on a semiconductor substrate; Wherein the external disturbance (118 ', 118, 119) is a mechanical strain in the semiconductor substrate affecting the output signal (116), the sensor means (120) for detecting the external disturbance (118', 118, 119) being a strain sensor for detecting at least one component of the mechanical strain (118 ', 118, 119) in the semiconductor material.
机译:一种用于产生取决于物理有用变量(108)的输出信号(116)的电路(150; 200),包括:-用于检测物理有用变量(108)的装置(106),其中,所述装置(106)用于检测被布置为产生物理有效尺寸(108)的输出信号(116),用于检测的装置(106)的控制信号(112),以及来自外部干扰(118)的控制信号(112)未改变。 ,118,119); -用于检测外部干扰(118',118、119)并根据外部干扰(118',118、119)提供传感器信号(122)的传感器装置(120); -装置(124),用于处理传感器信号(122)以响应于传感器信号(122)而影响控制信号(112),以便减小外部干扰(118',118、119)对传感器信号的影响。输出信号为: -其中电路还包括存储器(152),其适于存储以下信息:外部干扰(118',118、119)对传感器信号(122),控制信号(112)和/或再现的影响输出信号(116); -其中电路(150; 200)是半导体衬底上的集成电路;其中外部干扰(118′,118、119)是半导体衬底中影响输出信号(116)的机械应变,用于检测外部干扰(118′,118、119)的传感器装置(120)是应变。用于检测半导体材料中的机械应变(118',118、119)的至少一个分量的传感器。

著录项

  • 公开/公告号DE10154495C5

    专利类型

  • 公开/公告日2018-01-11

    原文格式PDF

  • 申请/专利权人 INFINEON TECHNOLOGIES AG;

    申请/专利号DE20011054495

  • 发明设计人 UDO DIPL.-ING. DR. AUSSERLECHNER;

    申请日2001-11-07

  • 分类号G01R33/07;G01R31/28;H01L23/58;H04B1/10;H04B15;

  • 国家 DE

  • 入库时间 2022-08-21 12:35:16

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