Combined charge part chen beam device, comprising:a cfe - sem, the one cfe - electron source, in order to achieve a sample with an electron beam radiation;an fib - device, which the sample is irradiated with an ion beam; anda control unit which, of an automatic sequence for repeatedly carrying out a samples monitoring with the cfe - rem and a sample handling with the fib - device controls,the control unit in the automatic sequence during the sample handling with the fib - device or during a transition time between the samples monitoring with the cfe - rem and the sample handling with the fib - device carries out a flushing, while on the cfe - electron source is an extraction voltage.
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