Transducer electromecanique integrating a deformable element of the type of resonator or membrane, and measurement sensor integrating such a transducer

摘要

Electromechanical transducer comprising a deformable member formed of a beam (10) or of a membrane (20), the beam being intended to vibrate in flexion at its resonance frequency which varies when an external force is applied thereto longitudinally, or of a membrane (20) intended to deform in bending under the effect of an external force applied on one of these two opposite faces. The deformable member is formed of an assembly of at least a first material (15, 23) and a second material (16, 24) which is different from the first material. The respective proportions by volume of the first and second materials constituting the deformable member combined with the geometrical dimensions of the deformable member are such that the temperature variation of the scale factor of the member is substantially zero.