首页> 外国专利> MONITORING THE ADVANCEMENT OF LIBS-BASED FUSION DURING THE PRODUCTION OF A INGOT BY SOLIDIFICATION DIRECTED BY REPEAT ON GERMS

MONITORING THE ADVANCEMENT OF LIBS-BASED FUSION DURING THE PRODUCTION OF A INGOT BY SOLIDIFICATION DIRECTED BY REPEAT ON GERMS

机译:在胶体上重复进行的凝固来监测锭子生产过程中基于LIBS的融合的进展

摘要

The invention relates to a method useful for monitoring the progress of the melting during the production of a silicon ingot by germ - directed solidification, comprising at least the steps of: (i) disposing, in a crucible a silicon charge positioned on the surface of one or more silicon seeds; said one or more seeds, and / or said silicon charge in one or more given position (s), comprising one or more tracer agents chosen from n-type or p-type doping agents having a partition coefficient in the silicon less than or equal to 10-1; metal elements having a partition coefficient in silicon less than or equal to 10-4; and the iso-electronic elements of silicon germanium and tin; (ii) evaluating, during the melting of the silicon charge, the presence and / or amount of tracer agent (s) by a chemical measurement technique of the LIBS type on the surface of the molten silicon bath; and (iii) determining, from the LIBS measurement (s), the progress of the merger.
机译:本发明涉及一种用于监测通过细菌定向凝固在生产硅锭期间的熔化过程的方法,该方法至少包括以下步骤:(i)在坩埚中放置位于坩埚表面上的硅料。一或多个硅种子;所述一个或多个种子和/或所述一个或多个给定位置的硅电荷,其包含一种或多种示踪剂,所述示踪剂选自在硅中的分配系数小于或等于的n型或p型掺杂剂。到10-1;在硅中的分配系数小于或等于10-4的金属元素;硅锗和锡的等电子元素; (ii)在熔化硅料期间,通过LIBS型化学测量技术在熔融硅浴的表面上评估示踪剂的存在和/或含量; (iii)从LIBS评估中确定合并的进度。

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