首页> 外国专利> DEVICE AND METHOD TO STABILIZE BEAM SHAPE AND SYMMETRY FOR HIGH ENERGY PULSED LASER APPLICATIONS

DEVICE AND METHOD TO STABILIZE BEAM SHAPE AND SYMMETRY FOR HIGH ENERGY PULSED LASER APPLICATIONS

机译:高能脉冲激光应用中稳定光束形状和对称性的装置和方法

摘要

A beam mixer for increasing intensity symmetry along a selected axis of a beam (wherein the beam extends from a first edge to a second edge along the axis) is disclosed and may include a plurality of mirrors establishing a spatially inverting path. For the beam mixer, the inverting path may have a beginning and an end and may be characterized in that a part of the beam near the first beam edge at the beginning of the path translates to the second beam edge at the end of the path. For this aspect, the beam mixer may further include an optic dividing the beam into first and second beam portions, the optic placing the first portion onto the inverting path and recombining the first and second portions onto a common path after the first portion has traveled along the inverting path thereby mixing the beam.
机译:公开了一种用于增加沿光束的选定轴的强度对称性的光束混合器(其中光束从该轴的第一边缘延伸到第二边缘),并且可以包括建立空间反转路径的多个反射镜。对于光束混合器,反向路径可以具有起点和终点,并且其特征在于,在路径的起点处靠近第一光束边缘的光束的一部分在路径的末端处转换为第二光束边缘。对于这个方面,光束混合器可以进一步包括将光束分成第一和第二光束部分的光学器件,该光学器件在第一部分沿第一光束行进之后将第一部分放置在反转路径上并且将第一部分和第二部分重新组合到公共路径上。反向路径从而混合光束。

著录项

  • 公开/公告号EP2036168B1

    专利类型

  • 公开/公告日2019-07-03

    原文格式PDF

  • 申请/专利权人 CYMER LLC;

    申请/专利号EP20070809174

  • 发明设计人 HOFMANN THOMAS;

    申请日2007-05-22

  • 分类号H01S3/08;H01S3;G02B27/14;G02B19;G02B27/09;H01S3/225;

  • 国家 EP

  • 入库时间 2022-08-21 12:31:57

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号