LaNiO3 thin film-forming composition and method of forming LaNiO3 thin film using the same

摘要

A LaNiO3 films with extremely seldom gap are formed uniformly. Provide the thin film-forming compositions of a LaNiO3 for being used to form a LaNiO3 films. It causes: a LaNiO3 precursors; First organic solvent; One stabilizer; Second organic solvent. First organic solvent includes carboxylic acid, alcohols, ester, ketone, ether, cycloalkanes, aromatic compounds or tetrahydrofuran. Stabilizer includes beta-diketon, β -one class, beta-keto esters, oxyacid, glycol, triol, carboxylic acid, alkanolamine or multivalence amine. Second organic solvent papula, 20 to 50 mechanics/centimetre 150 degrees Celsius to 300 degrees Celsius and the point LaNiO3 precursor contents of a surface tension about 100 mass % of composition be I to 20 mass %. Stabiliser content is 0 to 10 moles of one 1 moles of total values about LaNiO3 precursors. Second organic solvent content is 5 to the 20 quality % about composition.