DEFORMABLE MIRROR DEVICE WITH REPLACEABLE MIRROR SHEET AND METHOD TO ADHERE A MIRROR SHEET

摘要

Deformable mirror device comprising a reflective layer (1) for reflecting electromagnetic radiation, an actuator (2) for deforming the reflective layer essentially perpendicular to its surface and a base (3) for supporting the actuator. To allow an easy removal of mirror sheet comprising the reflective layer this deformable mirror comprises a first electrode (12) coupled to the actuator (2), and a second electrode (11), which first and second electrodes are electrically isolated and arranged relative to each other. Thus, the reflective layer (1) is coupled to the actuator (2) intermediately via the first and second electrode (11, 12). The invention also relates to a method to adhere a mirror sheet of a deformable mirror to an actuator.