PROPERTIES OF A SURFACE AND SUBSURFACE STRUCTURES WITH WHITE LIGHT INTERFEROMETRY USING PHOTONIC JETS

摘要

An arrangement for determining four-dimensional properties of an interface of an object, including a light source includes: a unit for forming photonic jets, a unit for performing large field of view interferometric imaging of the interface and their combination, a unit for passing the light being close to the interface and direct the light to the interface, and an image unit. The arrangement includes a unit for performing phase shifting interferometric imaging of the interface, imaging a unit for receiving light from the interface modulated by e.g. microspheres for forming super-resolution image information by combining light interferometry with the photonic jets, and a processor unit for determining four-dimensional properties of the interface on the basis of the image information formed by the phase shifting interferometric imaging by utilizing effect of the photonic jets. The arrangement also can also include a unit to carry out the measurement using polarized light.