MICROMECHANICAL DETECTION STRUCTURE FOR A MEMS SENSOR DEVICE, IN PARTICULAR A MEMS GYROSCOPE, WITH IMPROVED DRIVING FEATURES

摘要

A micromechanical detection structure (20) comprises: a substrate (2) of semiconductor material; a driving-mass arrangement (4a-4c), coupled to a set of driving electrodes (7a-7c) and driven in a driving movement following upon biasing of the set of driving electrodes; a first anchorage unit (5a-5c, 6a-6c), coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate (2) at first anchorages (5a-5c); a driven-mass arrangement (10, 30), elastically coupled to the driving-mass arrangement by a coupling unit (22a-22b) and designed to be driven by the driving movement; and a second anchorage unit (14, 34), coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate (2) at second anchorages (17, 37). Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate (2) at the first and second anchorages is substantially zero.