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SELF-ASSEMBLY COMPOSITION FOR PATTERN FORMATION, AND PATTERN FORMATION METHOD
SELF-ASSEMBLY COMPOSITION FOR PATTERN FORMATION, AND PATTERN FORMATION METHOD
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机译:用于图案形成的自组装组合物和图案形成方法
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摘要
It is an object of the present invention to provide a self-assembly composition for pattern formation having a wide range of applicable pattern size and being capable of forming a favorable phase-separated structure. The present invention relates to a self-assembly composition for pattern formation, which comprises a block copolymer comprising a polymerization unit (a) having at least one selected from a structure represented by the following formula (103) and a structure represented by the following formula (104), and a polymerization unit (b) having a structure represented by the following formula (105), wherein the content rate of a sugar moiety in the block copolymer is 3% by mass or more and 80% by mass or less based on the total mass of the block copolymer:展开▼
机译:本发明的目的是提供一种用于图案形成的自组装组合物,其具有宽范围的适用图案尺寸并且能够形成有利的相分离结构。本发明涉及用于图案形成的自组装组合物,其包含嵌段共聚物,所述嵌段共聚物包含具有选自下式(103)表示的结构和下式表示的结构中的至少一种的聚合单元(a)。 (104)和具有下式(105)表示的结构的聚合单元(b),其中嵌段共聚物中糖部分的含量为3质量%以上且80质量%以下嵌段共聚物的总质量: <图像文件=“ IMGA0001.GIF” he =“ 58” imgContent =“ chem” imgFormat =“ GIF” wi =“ 128” /> Chemistry> <化学id =“ chema02” > <图像文件=“ IMGA0002.GIF” he =“ 59” imgContent =“ chem” imgFormat =“ GIF” wi =“ 128” /> Chemistry> <化学ID =“ chema03”> <图像文件=“ IMGA0003 .GIF“ he =” 37“ imgContent =” chem“ imgFormat =” GIF“ wi =” 100“ /> Chemistry>
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