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SELF-ASSEMBLY COMPOSITION FOR PATTERN FORMATION, AND PATTERN FORMATION METHOD
SELF-ASSEMBLY COMPOSITION FOR PATTERN FORMATION, AND PATTERN FORMATION METHOD
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机译:用于图案形成的自组装组合物和图案形成方法
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摘要
It is an object of the present invention to provide a self-assembly composition for pattern formation having a wide range of applicable pattern size and being capable of forming a favorable phase-separated structure. The present invention relates to a self-assembly composition for pattern formation, which comprises a block copolymer comprising a polymerization unit (a) having at least one selected from a structure represented by the following formula (103) and a structure represented by the following formula (104), and a polymerization unit (b) having a structure represented by the following formula (105), wherein the content rate of a sugar moiety in the block copolymer is 3% by mass or more and 80% by mass or less based on the total mass of the block copolymer:
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