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SELF-ASSEMBLY COMPOSITION FOR PATTERN FORMATION, AND PATTERN FORMATION METHOD

机译:用于图案形成的自组装组合物和图案形成方法

摘要

It is an object of the present invention to provide a self-assembly composition for pattern formation having a wide range of applicable pattern size and being capable of forming a favorable phase-separated structure. The present invention relates to a self-assembly composition for pattern formation, which comprises a block copolymer comprising a polymerization unit (a) having at least one selected from a structure represented by the following formula (103) and a structure represented by the following formula (104), and a polymerization unit (b) having a structure represented by the following formula (105), wherein the content rate of a sugar moiety in the block copolymer is 3% by mass or more and 80% by mass or less based on the total mass of the block copolymer:
机译:本发明的目的是提供一种用于图案形成的自组装组合物,其具有宽范围的适用图案尺寸并且能够形成有利的相分离结构。本发明涉及用于图案形成的自组装组合物,其包含嵌段共聚物,所述嵌段共聚物包含具有选自下式(103)表示的结构和下式表示的结构中的至少一种的聚合单元(a)。 (104)和具有下式(105)表示的结构的聚合单元(b),其中嵌段共聚物中糖部分的含量为3质量%以上且80质量%以下嵌段共聚物的总质量:

著录项

  • 公开/公告号EP3459981A4

    专利类型

  • 公开/公告日2020-03-25

    原文格式PDF

  • 申请/专利权人 OJI HOLDINGS CORPORATION;

    申请/专利号EP20170798959

  • 发明设计人 MORITA KAZUYO;HATTORI KIMIKO;

    申请日2017-02-27

  • 分类号C08G81;C08G81/02;

  • 国家 EP

  • 入库时间 2022-08-21 11:41:28

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