CHARACTERIZING A HEIGHT PROFILE OF A SAMPLE BY SIDE VIEW IMAGING

摘要

A scanning probe microscope (1), in particular an atomic force microscope, for analysing a sample (6) by moving a probe (11) and the sample (6) relative to one another, wherein the scanning probe microscope (1) comprises a detection unit (60) which comprises a side view camera (90) arranged and configured for detecting an image of the sample (6) in a substantially horizontal side view, and a determining unit (80) for determining information indicative of a profile of at least part of a surface of the sample (6) based on the detected image.