APPARATUS FOR THE DETECTION OF THE SURFACE PROFILE OF A SURFACE OF AN OBJECT USING INTERFEROMETRY DISTANCE MEASUREMENT

摘要

An arrangement for detecting the surface profile of an object surface by means of interferometric distance measurement, comprising a radiation source for generating monochromatic light; an optical arrangement, with which a first part of the light from each radiation source for reflection on a measuring area on the object surface is steerable and superimposed with another, not reflected on the object surface part of the light of the radiation source such that interference is generated; a detector arrangement for detecting the resulting light beams; and a signal evaluation unit for evaluating the thus detected interferometric signals; characterized in that the optical arrangement comprises means for separating a part of the light reflected from the same measuring area of the object surface from the radiation sources without interference; a detector arrangement is provided for detecting the non-interfering light beams; wherein the reflection signals generated by the detector arrangement for detecting the non-interfering light beams reflection signals of the signal evaluation unit can be fed.